Essential F08200 - Semi F82 - Specification For Dimension Of Mass Flow Controller/mass Flow Meter For 1.125 Inch Type Surface Mount Gas Distribution Systems Now 90% Cheaper [2AgEsZqu]

SEMI F82 - Mass Flow Controller/Meter for 1.125 Inch Gas Distribution Systems

The SEMI F82 standard is a comprehensive guide designed for the dimension and properties of mass flow controllers and mass flow meters specifically tailored for 1.125 inch type surface mount gas distribution systems. This standard ensures that the components meet the highest industry standards, providing reliability and precision in gas flow control. With its technical approval by the global Gases Technical Committee, the SEMI F82 standard guarantees the quality and performance of these critical components.

Technical Specifications and Properties

The SEMI F82 standard outlines the common requirements, layout, size, and detailed specifications of the components. These components are designed to be mounted on substrates with fasteners accessible from the top, ensuring ease of installation and maintenance. The standard also specifies the operational parameters, including flow rates of ≤50 slm nitrogen equivalent at 308 kPa (44.7 psia) and operating pressures less than 3445 kPa (500 psia) at 20°C. This ensures compatibility with a wide range of gas distribution systems, making it an ideal choice for various applications.

Practical Applications and Benefits

The SEMI F82 standard is essential for industries that require precise gas flow control, such as semiconductor manufacturing. By adhering to this standard, manufacturers can ensure the consistent and reliable performance of their mass flow controllers and meters. This not only improves the efficiency of gas distribution systems but also contributes to the overall quality and yield of semiconductor products. With its focus on high purity and ultrahigh purity gas distribution systems, the SEMI F82 standard is the go-to choice for professionals seeking top-tier performance and reliability in their gas flow control solutions.