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SEMI E85 - Specification for AMHS Interbay Stocker to Transport System Interoperability

The SEMI E85 specification is a crucial document for the semiconductor industry, defining the dimensional requirements for the interbay load ports of 300mm automated material handling systems (AMHS) equipment. This standard aims to ensure interoperability between different types of interbay equipment, facilitating the use of various automated transport systems to meet diverse material handling needs throughout the factory. By providing six interface options, it guarantees seamless integration and efficient operations.

Key Features and Specifications

The SEMI E85 specification outlines six interface options that both stockers and interbay transport systems must comply with. These options include active and passive transport methods, as well as various carrier presentation positions. The features are designed to enhance compatibility and streamline the material handling process. Key specifications include:

• Active transport for loading carriers to internal or external stocker positions
• Passive transport for presenting carriers to internal or external stocker positions
• Multiple carrier pick-up methods, such as kinematic coupling pins and conveyor flange pick-up

These specifications ensure that the AMHS interbay equipment is adaptable to various factory layouts and material handling requirements.

Practical Applications and Benefits

The SEMI E85 specification offers numerous practical applications and benefits for semiconductor manufacturers. By promoting interoperability between different AMHS equipment, it allows for greater flexibility in designing and implementing factory layouts. Key benefits include:

• Improved efficiency in material handling processes
• Reduced downtime due to equipment incompatibility
• Enhanced scalability to accommodate future production needs

The SEMI E85 specification is an essential tool for semiconductor manufacturers seeking to optimize their production processes and achieve greater efficiency in their automated material handling systems.