Discounted E13400 - Semi E134 - Specification For Data Collection Management At A Low Price [gOGhpryD]

SEMI E13400 - Data Collection Management Specification

The SEMI E13400 - SEMI E134 Specification for Data Collection Management is a comprehensive guide designed to streamline the process of data acquisition for EDA (Electronic Design Automation) applications. This standard sets the foundation for an automated and efficient method of collecting process and data from semiconductor equipment, ensuring seamless communication between the equipment and the EDA application. With its robust features, this specification empowers users to organize and manage data more effectively, leading to improved productivity and decision-making in the semiconductor industry.

• Automated Data Collection: The specification enables equipment to communicate data in an automated fashion, reducing manual effort and potential errors.
• Data Organization: It provides a mechanism for grouping related data, making it easier to enable or disable multiple data sources and organize data according to its purpose.

Technical Details and Specifications

The SEMI E13400 specification encompasses a range of technical details and specifications that define the behavior and interface requirements for data collection plans. It outlines the format of data collection plans, the meaning of their contents, and the interface that must be supported by the equipment. Additionally, the specification defines finite state machines for executing data collection plans and specifies the formats for data produced as a result of these plans. This ensures consistency and interoperability across different systems and equipment.

• Data Collection Plans: The specification defines the structure and content of data collection plans, enabling equipment to efficiently manage and execute data requests.
• Finite State Machines: It employs finite state machines to define the behavior associated with the execution of data collection plans, ensuring predictable and reliable outcomes.

Practical Applications and Benefits

The SEMI E13400 specification is a valuable tool for semiconductor equipment manufacturers, EDA application developers, and end-users alike. By facilitating efficient data collection and management, this specification enhances the overall performance and reliability of semiconductor manufacturing processes. It is particularly beneficial in scenarios where real-time data analysis and decision-making are critical, such as process optimization, yield improvement, and equipment diagnostics.

• Process Optimization: The automated data collection and management capabilities enable manufacturers to optimize their processes, leading to higher yields and reduced production costs.
• Equipment Diagnostics: The specification helps in diagnosing and resolving equipment issues promptly, minimizing downtime and improving overall equipment effectiveness (OEE).