Viral Mf092800 - Semi Mf928 - Test Method For Edge Contour Of Circular Semiconductor Wafers And Rigid Disk Substrates Collection [me0RyUu7]

SEMI MF928: Precision Edge Contour Testing

The SEMI MF928 – Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates is a comprehensive testing standard designed to ensure the precision and quality of wafer edge contours. This method is crucial for semiconductor manufacturers, as it directly impacts the performance and reliability of electronic devices. The core features of this test method include the ability to measure and verify wafer edge contours against industry-standard specifications, thereby reducing the incidence of chipping and minimizing epitaxial edge crown and photoresist edge bead during subsequent processing. This ensures a higher quality end product with fewer defects.

Technical Specifications and Methodologies

The SEMI MF928 provides two distinct testing methods to cater to various needs. Method A is a destructive test, limited to inspecting discrete points on the wafer's periphery, including flats. This method is recommended for examining the edge profile of flatted regions and is best suited for referee purposes. Method B, on the other hand, is non-destructive and suitable for inspecting all points on the wafer periphery except flats or notches. It is ideal for routine process monitoring, quality control, and incoming/outgoing inspection purposes. Both methods are designed to ensure that wafer edge contours meet the stringent requirements of SEMI M1 or SEMI M9 specifications, providing a reliable solution for semiconductor manufacturers.

Applications and Benefits

The SEMI MF928 is an essential tool for semiconductor manufacturers looking to improve the quality and performance of their products. By ensuring that wafer edge contours meet the required specifications, this test method helps in reducing defects and enhancing the overall reliability of electronic devices. Its applications span across various industries, including the production of silicon, gallium arsenide, and other electronic materials. The benefits of using this test method are numerous, including improved yield rates, reduced production costs, and enhanced product quality. Whether it's for routine process monitoring or referee purposes, the SEMI MF928 is a valuable asset for any semiconductor manufacturing facility.