5-star Rated Mf072800 - Semi Mf728 - Practice For Preparing An Optical Microscope For Dimensional Measurements Trusted Seller [ECBYwyu4]

Optical Microscope Practice for Dimensional Measurements

The SEMI 5-star Rated Mf072800 - Semi Mf728 - Practice For Preparing An Optical Microscope For Dimensional Measurements Trusted Seller [ECBYwyu4] is a comprehensive guide designed to optimize the performance of optical microscopes for precise dimensional measurements. This practice focuses on enhancing the accuracy and reliability of measurements by providing detailed instructions for adjusting and calibrating the microscope.

Key Product Properties and Specifications

This practice covers the preparation of an optical microscope for dimensional measurements, specifically for the width of lines ranging from 0.5 µm to 12 µm on hard-surface photomasks and processed silicon wafers. It includes essential steps for achieving Kohler illumination, which ensures uniform lighting and enhances image contrast. The practice also emphasizes the importance of setting the ratio of condenser numerical aperture to objective numerical aperture to approximately two-thirds for optimal edge gradient and improved repeatability in measurements. Additionally, it addresses the reduction of image-contrast variation across different microscope systems, making it a versatile tool for various applications.

Practical Applications and Benefits

The SEMI MF072800 - SEMI MF728 - Practice is particularly valuable for professionals in the semiconductor industry, where precise measurements of linewidths are crucial for quality control and process optimization. By following this practice, users can ensure accurate dimensional measurements, which are essential for comparing design values, determining process quality, and facilitating materials acceptance. The practice is compatible with various microscope systems, including those equipped with optical filar, video filar, optical image-shearing, optical image-scanning, and video image-scanning micrometers. Its focus on bright-field illumination makes it suitable for both optically transparent and opaque specimens, further expanding its utility in various fields.