Last Chance Mf207400 - Semi Mf2074 - Guide For Measuring Diameter Of Silicon And Other Semiconductor Wafers Accessory [VKe0816s]

SEMI Standard Guide for Measuring Wafers

The SEMI MF2074 guide is an essential resource for professionals in the microelectronic fabrication industry. This comprehensive guide serves as a standardized reference for measuring the diameter of silicon and other semiconductor wafers. With its focus on ensuring precise measurements, the guide helps maintain consistency in the manufacturing process, where wafer dimensions are critical for compatibility with process equipment. Key features of this guide include:

• Standardized positions for diameter measurement
• Guidance for edge-follower edge-rounding equipment
• Relevant to wafer sizes up to 150 mm

By adhering to the guidelines outlined in this guide, manufacturers can ensure their wafers meet the stringent requirements of SEMI M1 and other industry standards.

Technical Specifications and Properties

The SEMI MF2074 guide is specifically designed for wafer sizes up to 150 mm with standard diameter and fiducial positions as per SEMI M1. It takes into account the challenges posed by edge-follower edge-rounding equipment, which may result in elliptically shaped wafers. The guide provides precise measurement positions to assess roundness, which is crucial for maintaining the quality of semiconductor manufacturing processes. Some key technical details include:

• Applicable to wafer sizes up to 150 mm
• Consideration of flats or notches (fiducials) on the wafer periphery
• Focus on roundness and diameter measurements

This guide offers a robust framework for accurate wafer measurements, ensuring that each wafer meets the required specifications.

Practical Applications and Benefits

The SEMI MF2074 guide is invaluable for professionals involved in the production and quality control of semiconductor wafers. Its precise measurements and guidelines help ensure that wafers fit correctly into process equipment, reducing the risk of production delays and costs. The guide is particularly beneficial in scenarios such as:

• Manufacturing facilities that rely on precise wafer measurements
• Quality control teams responsible for assessing wafer roundness
• Researchers and engineers working in semiconductor fabrication

By providing a standardized approach to measuring wafer dimensions, the SEMI MF2074 guide supports the overall efficiency and success of semiconductor manufacturing processes.