Festive Deal M07000 - Semi M70 - Test Method For Determining Wafer-near-edge Geometry Using Partial Wafer Site Flatness Perfect For Gifting [iUxbhl7Y]

M07000 - SEMI M70 - Wafer Near-Edge Geometry Test Method

The SEMI M70 standard, titled "Test Method for Determining Wafer-Near-Edge Geometry Using Partial Wafer Site Flatness," is a crucial tool for semiconductor manufacturers. This method ensures the highest yield in semiconductor device processing by precisely quantifying wafer near-edge geometry. With its focus on partial wafer site flatness, it provides a reliable and efficient way to assess the dimensional characteristics of wafers, ensuring they meet the stringent geometrical requirements of advanced IC manufacturing.

Key Product Features and Specifications

The SEMI M70 standard utilizes the PSFQR and PSFQD metrics to quantify near-edge geometry, making it ideal for wafers with site patterns that cover large parts of the edge. This method is applicable to various wafer types, including polished, epitaxial, SOI, and others, and is suitable for advanced IC manufacturing processes as specified in SEMI M1. The standard also references other SEMI standards, such as SEMI M1 for wafer specifications, SEMI M20 for wafer coordinate systems, and SEMI M49 for geometry measurement systems, ensuring comprehensive and consistent testing procedures.

Practical Applications and Benefits

The SEMI M70 standard is an essential tool for both producers and consumers in the semiconductor industry. By providing detailed information on wafer near-edge geometry, it helps in determining if the wafer dimensions meet the required geometrical specifications. This ensures better yield and quality in semiconductor device processing. The standard's focus on partial site flatness makes it a valuable process control tool and a material exchange specification for edge geometry. With its ability to quantify specific aspects of edge geometry, such as ZDD, ESFQR, ROA, and others, the SEMI M70 standard is a comprehensive solution for ensuring the highest quality in wafer manufacturing.