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Free Shipping F07000 - Semi F70 - Test Method For Determination Of Particle Contribution Of Gas Delivery System Best Choice [QndG3BTC]
NOTICE: The designation of SEMI F70 was updated during the 0320publishing cycle to reflect the creation of SEMI F70.1. The purpose of this Document is to provide astandardized methodology and procedure for measuring the particle contributionperforman
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NOTICE: The designation of SEMI F70 was updated during the 0320
publishing cycle to reflect the creation of SEMI F70.1.
The purpose of this Document is to provide a
standardized methodology and procedure for measuring the particle contribution
performance of a gas delivery system in terms of number of particles added to
gas flowing through the system. This standardized procedure is intended to be
used commonly by the gas delivery system suppliers, equipment suppliers, and
end-users.
This Test Method applies to surface mount and
conventional gas delivery systems used in semiconductor manufacturing equipment.
Subordinate Standards:
SEMI F70.1-0320 — Test Method for Determination of Particle Contribution of Gas Delivery System and Its Components Through Pulsed Testing
Referenced SEMI Standards
SEMI C57 — Specification for Argon
SEMI C59 — Specification for Nitrogen
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