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SEMI F49 - Guide for Semiconductor Factory Systems Voltage Sag Immunity

The SEMI F49 guide is a comprehensive resource designed to address the critical need for power conditioning in semiconductor and flat panel display (FPD) facilities. This guide is essential for ensuring high levels of power quality, which is vital due to the sensitivity of equipment and process controls in these industries. The guide emphasizes the vulnerability of semiconductor and FPD processing equipment to voltage sags, highlighting the importance of integrating voltage sag susceptibility with utility power quality.

Key Features and Benefits:

• Systematic approach to power conditioning for semiconductor and FPD facilities.
• Enhanced power quality for sensitive equipment and process controls.
• Identification of appropriate conditioning technologies for efficient power management.

Product Properties and Technical Details

The SEMI F49 guide provides a detailed systems approach to power conditioning, ensuring that facility electrical distribution systems are designed to integrate voltage sag susceptibility with utility power quality. It offers recommendations for effective power conditioning, resulting in optimal performance of process equipment, support equipment, and facility infrastructure equipment. The guide is intended for facilities engineers, equipment engineers, and facilities managers who specify compatibility requirements for equipment and utility services, particularly for electrical power requirements as outlined in SEMI E51.

Practical Uses and Target Audience

The SEMI F49 guide is a valuable tool for professionals in the semiconductor and FPD industries, aiming to enhance the functionality and reliability of their facilities. By implementing the recommendations in this guide, facilities can ensure that their process equipment, associated support equipment, and facilities infrastructure equipment operate within acceptable ranges, minimizing downtime and improving overall productivity. This guide is ideal for anyone involved in specifying compatibility requirements for equipment and utility services, particularly those responsible for electrical power requirements in semiconductor and FPD facilities.