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SEMI E84: Enhanced Carrier Handoff Parallel I/O Interface

The SEMI E84 standard is a crucial specification designed to improve the efficiency and reliability of semiconductor manufacturing processes. As wafer sizes increase, so does the need for advanced automated material handling systems (AMHS). This standard addresses the growing demand for better-defined parallel input/output (PI/O) control signals between production equipment and AMHS, ensuring seamless and secure transfer of wafer carriers.

Key Features and Benefits

The SEMI E84 specification offers a range of enhancements to the parallel I/O interface as defined in SEMI E23. Key features include continuous and simultaneous handoff capabilities, as well as robust error detection on the interface. These enhancements ensure that carrier transfers are not only efficient but also secure, minimizing downtime and maximizing throughput. The following are some of the standout benefits of this standard:

Enhanced reliability and efficiency in carrier handoff operations

Continuous and simultaneous handoff capabilities for improved throughput

Robust error detection and recovery mechanisms to minimize downtime

Application and Scope

The SEMI E84 specification is designed to support a wide range of semiconductor manufacturing applications, particularly those involving large wafer sizes and advanced AMHS systems. It is applicable to various types of active and passive equipment, including AMHS vehicles like AGV, RGV, and OHT, as well as production equipment such as process and metrology equipment, stockers, and open cassettes. The specification also covers interbay AMHS systems, ensuring seamless material handoff across different stages of the semiconductor manufacturing process. The following are some of the practical applications of this standard:

Automated material handling systems in semiconductor fabs

Process and metrology equipment interfacing with AMHS

Interbay material handoff in large-scale semiconductor manufacturing