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SEMI E66: Test Method for Particle Contribution by Mass Flow Controllers

The SEMI E66 standard is a crucial resource for manufacturers and end users in the high-purity gas system industry. This comprehensive test method ensures accurate measurement and comparison of particle contribution by mass flow controllers (MFCs). With its technical approval by the Gases Global Technical Committee and publication in 2017, the SEMI E66 standard has become a benchmark for quality and reliability.

Key Features and Specifications:

• Statistical Significance: The SEMI E66 standard employs a test method that yields statistically significant comparisons of particle contribution among MFCs under test conditions, providing reliable data for decision-making.
• Procedure Definition: The standard defines a procedure for testing MFCs intended for installation into high-purity gas systems, ensuring that the equipment meets stringent industry requirements.

Benefits and Practical Uses:

• Enhanced Performance: By using MFCs that meet the SEMI E66 standard, manufacturers and end users can achieve enhanced performance and reliability in their high-purity gas systems.
• Cost-Effective: The SEMI E66 standard helps in selecting the right MFCs for a specific application, reducing costs associated with trial and error and ensuring optimal system performance.

This standard also references other SEMI standards, such as SEMI E29 for terminology related to the calibration of MFCs and SEMI F1 for specification of leak integrity in high-purity gas piping systems and components. By adhering to the SEMI E66 standard, users can ensure that their MFCs are not only compliant with industry standards but also contribute to the overall performance and efficiency of their high-purity gas systems.