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SEMI E63 Specification for Box Opener/Loader Interface

The SEMI E63 Standard is a comprehensive guide designed to specify the mechanical interface between the main part of a process or metrology tool and the box opener/loader unit. This interface is crucial for the efficient handling and unloading/loading of 300 mm wafers. The box opener/loader unit is equipped with one or more load ports, conforming to SEMI E15.1 standards, and has storage capacity for empty boxes or waiting lots. This unit is versatile, capable of handling not only boxes conforming to SEMI E47.1 and SEMI E62 standards but also opening cassettes according to SEMI E1.9 specifications. The standard defines a single interface for all such carriers and carrier capacities, including 13 and 25 wafers.

• Enhanced versatility with multi-carrier support
• Compliance with SEMI E15.1, E47.1, E62, and E1.9 standards

Technical Specifications and Interface Details

The SEMI E63 Standard is intended to establish a specification level that minimizes limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. It specifically addresses the mechanical interface without specifying materials requirements or micro-contamination limits. The interface is designed for tools with a sealed minienvironment but can also serve as a well-defined automation interface. It is not intended to provide high repeatability or rapid removal, which can be addressed by other couplings within the box opener/loader unit. The standard does not apply when load ports are stacked vertically or when open cassettes are inserted directly into load-lock chambers.

• Modular and interchangeable interfaces
• Sealed minienvironment compatibility
• Focus on mechanical interface specifications

Practical Applications and Target Audience

The SEMI E63 Standard is ideal for semiconductor manufacturing environments where efficient wafer handling is critical. It caters to a wide range of users, including tool manufacturers, semiconductor manufacturers, and research institutions. The standard ensures seamless integration of box opener/loader units with various tools, enhancing productivity and reducing downtime. By adhering to SEMI E63, companies can achieve a high level of efficiency in wafer handling processes, leading to improved overall production quality and reduced costs.

• Targeted at semiconductor manufacturing and research institutions
• Enhances productivity and reduces downtime
• Improves production quality and cost-effectiveness