Viral E15800 - Semi E158 - Specification For Mechanical Features Of Fab Wafer Carrier Used To Transport And Store 450 Mm Wafers (450 Foup) And Kinematic Coupling Pro Version [lnOw5igS]

SEMI E15800 - Fab Wafer Carrier Specification

Introducing the SEMI E15800, a comprehensive specification designed to define the mechanical features of the Fab Wafer Carrier, specifically for the transportation and storage of 450 mm wafers. This carrier is meticulously crafted to ensure seamless interoperability within semiconductor device manufacturing facilities, adhering to the stringent standards set by SEMI M74. The SEMI E15800 not only provides a robust solution for wafer handling but also supports the dynamic evolution of the semiconductor industry with its flexible design.

• Compliance with SEMI M74 ensures that the carriers meet the industry's highest quality and performance standards.
• Interoperability is guaranteed through the defined requirements, allowing for seamless integration with various equipment and systems.

Technical Specifications and Features

The SEMI E15800 specification outlines the critical dimensions and reference planes for the carriers, ensuring precise positioning and support for 450 mm wafers. Key features include:

• Carrier Dimensions: The document specifies the external features and dimensions, providing a clear blueprint for the carrier's design.
• Interior Exclusion Volumes: Detailed specifications for the interior space ensure proper support and restraint of wafers within the carrier.
• Kinematic Coupling Pins (KCPs): The specification defines the critical dimensions and locations of KCPs, which are essential for accurate carrier positioning and support.

This technical rigor ensures that the SEMI E15800 carrier is not only compatible with current manufacturing processes but also adaptable to future advancements.

Practical Applications and Benefits

The SEMI E15800 Fab Wafer Carrier is an essential tool for semiconductor manufacturers seeking to optimize their wafer handling processes. Its benefits include:

• Enhanced Efficiency: The carrier's design facilitates efficient transportation and storage of 450 mm wafers, reducing downtime and improving overall process flow.
• Increased Reliability: The specified requirements for interoperability ensure that the carrier functions reliably with various equipment and systems.
• Adaptability: The flexible design of the carrier allows for easy integration with new technologies and manufacturing processes.

Whether you are a manufacturer looking to enhance your wafer handling capabilities or an equipment supplier aiming to develop compatible solutions, the SEMI E15800 is the ideal specification to guide your endeavors.