Trending E16300 - Semi E163 - Guide For The Handling Of Reticles And Other Extremely Electrostatic Sensitive (ees) Items Within Specially Designated Areas - Today Only [oiRQXvaD]

SEMI E163: Guide for Handling EES Items

The SEMI E163 document is a comprehensive guide designed to minimize the negative impact of static charge and electric fields on productivity in semiconductor manufacturing. This essential resource is crafted to ensure the optimal electrostatic compatibility of handling environments for reticles and other extremely electrostatic sensitive (EES) items. With its focus on mitigating static charge, voltage, and electric field effects, SEMI E163 serves as a vital tool for equipment manufacturers, users, and producers of EES items, ensuring the highest level of protection for sensitive components.

Technical Specifications and Recommendations

SEMI E163 provides detailed recommendations for the design and testing of semiconductor manufacturing equipment, emphasizing the importance of electric field management in addition to traditional static charge mitigation techniques. The document outlines principles for handling reticles and other EES items within controlled environments, specifying the appropriate level of electric field to maintain. It also presents guidelines for grounding and material selection, which may deviate from established electrostatic charge control methods, emphasizing the need for a specially designated area for implementation. SEMI E163 references other SEMI standards, including SEMI E78, SEMI E129, and SEMI E43, to provide a comprehensive set of guidelines for managing electrostatic risks.

Practical Applications and Target Audience

SEMI E163 is a must-have for professionals in the semiconductor industry, particularly those involved in the design, testing, and production of equipment and EES items. The guide is particularly beneficial for those working with reticles, small geometry device structures on wafers, packaged devices in back-end processing, and device structures on glass in flat panel display manufacturing. By following the recommendations in SEMI E163, users can significantly reduce the risk of damage to sensitive components, leading to improved productivity and reliability in semiconductor manufacturing processes. This document is an invaluable resource for anyone looking to enhance the protection and handling of EES items in a controlled environment.