Premium Quality Tel Tokyo Electron 300mm Cpl Chilling Hot Plate Process Station Lithius Working Best Choice [ZHKQvYtM]
Model No: CPL Chilling Hot Plate Process Station
Removed from a TEL Tokyo Electron Clean Track Lithius System
Made in Japan
Installed Components
Komatsu Part No: 20001870, RCC-300
Omron Part No: E3X-DA11-N (Qty. 2)
TEL PCB Part No: HTE-MC1-B-12, TMB2001, BOARD,CONN HPI #01
Parts List (approximation, parts may vary or not be included or installed)
Assembly Part No: 5087-402532-13, BASE ASSY,FRONT
5010-101316-11 FRAME(CPL-1) (Qty. 1)
5010-306509-11 BRACKET (Qty. 1)
5010-306510-11 BRACKET (Qty. 1)
5010-405033-11 ARM(SHUTTER) (Qty. 1)
5010-405043-11 ARM(SHUTTER) (Qty. 1)
5010-405032-11 COLLAR (Qty. 2)
5010-203103-11 SHUTTER (Qty. 1)
5010-203102-11 SHUTTER (Qty. 1)
5010-306013-11 COVER (Qty. 1)
5010-306018-11 COVER (Qty. 1)
5010-405129-11 BLOCK (Qty. 1)
5010-101070-11 PAN,DRAIN (Qty. 1)
5010-405158-11 SUPPORT,PIN (Qty. 1)
5010-405159-11 SUPPORT,PIN (Qty. 1)
5010-405111-11 BRACKET (Qty. 2)
5010-405678-11 BRACKET (Qty. 2)
5010-307630-11 SUPPORT (Qty. 1)
5010-405677-11 PLATE (Qty. 2)
5010-306869-11 SUPPORT (Qty. 1)
5010-406021-11 SEAL (Qty. 2)
5010-307631-11 SUPPORT (Qty. 1)
5010-307632-11 BAR (Qty. 1)
5086-400772-11 SENSOR,CYLINDER CPL O/C #03 (Qty. 1)
5086-400774-11 SENSOR,CYLINDER CPL O/C #04 (Qty. 1)
5018-000015-11 LM GUIDE SRS9ME+73LM G=6.5 (Qty. 4)
5024-000042-11 AIR CYLINDER SSD-L1637-X02 (Qty. 2)
020-001186-1 CAP SCREW M3*35 SUS304 (Qty. 6)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 18)
020-100801-1 CAP SCREW M3*5 SUS304 (Qty. 16)
020-001093-1 CAP SCREW M4*14 SUS304 (Qty. 2)
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND (Qty. 6)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 16)
020-000032-1 CAP SCREW M4*10 SUS304 (Qty. 8)
020-000352-1 SET SCREW M4*10 SUS304 (Qty. 8)
020-000030-1 CAP SCREW M4*8 SUS304 (Qty. 2)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty. 19)
028-003338-1 FITTING,TUBE M-5HL-4 (Qty. 2)
028-003337-1 FITTING,TUBE M-5H-4 (Qty. 14)
026-000034-1 SET PLATE TM-147-2-5564 WASHER (Qty. 2)
020-002807-1 CAP SCREW M4*12 SUS304 W/SPR FLAT WASHER (Qty. 4)
028-005990-1 FITTING,TUBE CF-SUS (Qty. 6)
017-002107-1 TUBE PN-4-4*2.5 YELLOW (Qty. 1)
Assembly Part No: 5087-401685-19, BASE ASSY,MID
5010-202452-11 DUCT (Qty. 1)
5010-202450-11 DUCT(L) (Qty. 1)
5010-202451-11 SHUTTER (Qty. 1)
5010-306020-12 COVER(L) (Qty. 1)
5010-306022-11 BLOCK (Qty. 1)
5010-405047-11 COVER (Qty. 1)
5010-306418-11 SHUTTER(L) (Qty. 1)
5010-306419-11 SHUTTER(R) (Qty. 1)
5010-306015-11 DUCT(R) (Qty. 1)
5010-306149-11 BRACKET (Qty. 1)
5010-407356-11 BRACKET (Qty. 2)
5010-306021-11 COVER(R) (Qty. 1)
5010-101543-11 FRAME(CPL-2) (Qty. 1)
5010-404625-11 PLATE (Qty. 2)
5003-300040-11 PORT (Qty. 2)
5010-203472-11 COVER,UNDER (Qty. 1)
5010-407435-11 SEAL (Qty. 2)
5010-400295-11 SEAL (Qty. 1)
5010-405160-11 PIN (Qty. 4)
5010-307624-11 PLATE (Qty. 2)
5010-405663-11 PACKING (Qty. 1)
5010-405664-11 PACKING (Qty. 1)
5010-309040-11 PACKING (Qty. 1)
5010-306786-11 BLACKET (Qty. 1)
5010-306787-11 BLACKET (Qty. 1)
5086-400778-12 CABLE,CPL EXT #06 (Qty. 1)
5086-401780-11 SENSOR,PROXIMITY CPL #02 (Qty. 1)
5010-406358-11 BLOCK (Qty. 2)
028-003339-1 FITTING,TUBE M-5HL-6 (Qty. 2)
044-000045-1 SUPPORT,PCB EM-5 (Qty. 2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 24)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 14)
026-000034-1 SET PLATE TM-147-2-5564 WASHER (Qty. 2)
020-001091-1 CAP SCREW M4*16 SUS304 (Qty. 14)
033-000007-1 NUT M4 SUS304 (Qty. 4)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty. 12)
020-003986-1 FLAT COUNTERSUNK HEAD SCREW M4*5 SUS316 (Qty. 6)
020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 (Qty. 6)
020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2)
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND (Qty. 8)
032-000058-1 SPRING WASHER M4 SUS304 (Qty. 8)
028-006361-1 FITTING,TUBE EUC6-TR (Qty. 2)
028-005698-1 FITTING,TUBE BC6 (Qty. 2)
017-002716-1 TUBE PN-4-6*4 GREEN (Qty. 1)
Assembly Part No: 5087-401685-19, BASE ASSY,MID
5010-202452-11 DUCT (Qty. 1)
5010-202450-11 DUCT(L) (Qty. 1)
5010-202451-11 SHUTTER (Qty. 1)
5010-306020-12 COVER(L) (Qty. 1)
5010-306022-11 BLOCK (Qty. 1)
5010-405047-11 COVER (Qty. 1)
5010-306418-11 SHUTTER(L) (Qty. 1)
5010-306419-11 SHUTTER(R) (Qty. 1)
5010-306015-11 DUCT(R) (Qty. 1)
5010-306149-11 BRACKET (Qty. 1)
5010-407356-11 BRACKET (Qty. 2)
5010-306021-11 COVER(R) (Qty. 1)
5010-101543-11 FRAME(CPL-2) (Qty. 1)
5010-404625-11 PLATE (Qty. 2)
5003-300040-11 PORT (Qty. 2)
5010-203472-11 COVER,UNDER (Qty. 1)
5010-407435-11 SEAL (Qty. 2)
5010-400295-11 SEAL (Qty. 1)
5010-405160-11 PIN (Qty. 4)
5010-307624-11 PLATE (Qty. 2)
5010-405663-11 PACKING (Qty. 1)
5010-405664-11 PACKING (Qty. 1)
5010-309040-11 PACKING (Qty. 1)
5010-306786-11 BLACKET (Qty. 1)
5010-306787-11 BLACKET (Qty. 1)
5086-400778-12 CABLE,CPL EXT #06 (Qty. 1)
5086-401780-11 SENSOR,PROXIMITY CPL #02 (Qty. 1)
5010-406358-11 BLOCK (Qty. 2)
028-003339-1 FITTING,TUBE M-5HL-6 (Qty. 2)
044-000045-1 SUPPORT,PCB EM-5 (Qty. 2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 24)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 14)
026-000034-1 SET PLATE TM-147-2-5564 WASHER (Qty. 2)
020-001091-1 CAP SCREW M4*16 SUS304 (Qty. 14)
033-000007-1 NUT M4 SUS304 (Qty. 4)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty. 12)
020-003986-1 FLAT COUNTERSUNK HEAD SCREW M4*5 SUS316 (Qty. 6)
020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 (Qty. 6)
020-000417-1 CAP SCREW M2*10 SUS304 (Qty. 2)
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND (Qty. 8)
032-000058-1 SPRING WASHER M4 SUS304 (Qty. 8)
028-006361-1 FITTING,TUBE EUC6-TR (Qty. 2)
028-005698-1 FITTING,TUBE BC6 (Qty. 2)
017-002716-1 TUBE PN-4-6*4 GREEN (Qty. 1)
Assembly Part No: 5087-401686-17, BASE ASSY,BACK
5010-203473-12 BRACKET (Qty. 1)
5010-308930-11 BASE(R) (Qty. 1)
5010-308932-11 BASE(L) (Qty. 1)
5010-407056-11 BRACEKT (Qty. 1)
5010-407057-11 BRACEKT (Qty. 1)
5010-308942-11 BRACKET (Qty. 1)
5010-400935-11 BAR (Qty. 1)
5010-308904-11 BLOCK (Qty. 1)
5041-000250-11 CABLE ASSY 1717321-1 (CPL EXT #01) (Qty. 1)
5041-000251-12 CABLE ASSY 1717319-9 (CPL EXT #02) (Qty. 1)
5041-000252-12 CABLE ASSY 1717319-2 (CPL EXT #03) (Qty. 1)
5041-000253-11 CABLE ASSY 1717321-2 (CPL EXT #04) (Qty. 1)
5041-000254-11 CABLE ASSY 1717321-3 (CPL EXT #05) (Qty. 1)
5086-401772-12 CABLE,CPL EXT #07 (Qty. 1)
5086-400781-11 CABLE,CPL SIG #01 (Qty. 1)
5086-400782-11 CABLE,CPL SIG #02 (Qty. 1)
5086-400783-11 CABLE,CPL SIG #03 (Qty. 1)
5044-000008-11 I/F BOARD TMB2001(BOARD,CONN HPI #01) (Qty. 1)
028-004347-1 FITTING,TUBE KJL06-01S (Qty. 3)
028-004353-1 FITTING,TUBE KJU06-00 (Qty. 1)
024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 (Qty. 10)
5012-000020-11 SOLENOID VALVE SS5Y3-05-X1235 (Qty. 1)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 10)
020-001715-1 CAP SCREW M3*60 SUS304 (Qty. 4)
020-001178-1 CAP SCREW M3*30 SUS304 (Qty. 4)
032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND (Qty. 3)
020-000009-1 CAP SCREW M3*10 SUS304 (Qty. 4)
044-000045-1 SUPPORT,PCB EM-5 (Qty. 4)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 1)
020-000519-1 CAP SCREW M3*16 SUS304 (Qty. 1)
028-003337-1 FITTING,TUBE M-5H-4 (Qty. 10)
020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE (Qty. 3)
020-000030-1 CAP SCREW M4*8 SUS304 (Qty. 5)
020-000042-1 CAP SCREW M4*20 SUS304 (Qty. 3)
017-002107-1 TUBE PN-4-4*2.5 YELLOW (Qty. 1)
Assembly Part No: 5087-401687-13, BASE(3P-CPL)ASSY
5010-306035-11 BRACKET(JOINT) (Qty. 1)
5010-306036-11 PLATE(ARM) (Qty. 1)
5010-405056-11 PLATE(BRIDGE) (Qty. 1)
5010-400931-11 BRACKET (Qty. 1)
5003-300050-11 SUPPORT,PIN (Qty. 1)
5010-405032-11 COLLAR (Qty. 1)
5010-306778-11 BRACKET (Qty. 1)
5003-400004-11 PIN(85) (Qty. 3)
5086-400766-11 SENSOR,CYLINDER CPL U/D #01 (Qty. 1)
5086-400786-11 CABLE,GND CPL #01 (Qty. 1)
5086-405087-1 CABLE,GND CPL #05 (Qty. 1)
5018-000012-11 LM GUIDE SSR15XV1FME+80LYF (Qty. 1)
5024-000012-11 AIR CYLINDER SSD-L1622-X01 (Qty. 1)
026-007243-1 SPACER WZJM10-6 (Qty. 3)
026-007244-1 SPACER WSJM10-4-3 (Qty. 3)
020-000032-1 CAP SCREW M4*10 SUS304 (Qty. 5)
020-000034-1 CAP SCREW M4*12 SUS304 (Qty. 2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 2)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty. 6)
020-001091-1 CAP SCREW M4*16 SUS304 (Qty. 1)
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND (Qty. 1)
020-000012-1 CAP SCREW M3*12 SUS304 (Qty. 3)
020-001126-1 SET SCREW M4*5 SUS304 (Qty. 3)
020-002059-1 SET SCREW M3*5 SUS304 (Qty. 3)
028-003338-1 FITTING,TUBE M-5HL-4 (Qty. 1)
028-003337-1 FITTING,TUBE M-5H-4 (Qty. 1)
Assembly Part No: 5085-408084-11, BASE(CPL)ASSY,SUPPORT
5010-306012-11 PLATE (Qty. 2)
5086-400777-13 SENSOR,WATER LEAK CPL #01 (Qty. 1)
5086-400873-11 CABLE,GND CPL #05 (Qty. 1)
5013-000001-11 PLATE,COOLING RCP-3001 (Qty. 1)
5013-000003-11 #CONTROLLER RCC-300 (Qty. 1)
028-002157-1 FITTING,TUBE F900-F-9.52 (Qty. 2)
020-000352-1 SET SCREW M4*10 SUS304 (Qty. 8)
020-000032-1 CAP SCREW M4*10 SUS304 (Qty. 4)
033-000007-1 NUT M4 SUS304 (Qty. 5)
017-005003-1 TUBE PFA-HG L 9.52*7.52-200*1000 (Qty. 2)
Assembly Part No: 5085-404679-12, GUIDE(10) ASSY
5004-400001-11 GUIDE (509510012311 (Qty. 9)
020-000177-1 FLAT (Qty. 9)
Assembly Part No: 5085-413028-11, GUIDE(11) ASSY
5010-407217-11 GUIDE (Qty. 9)
020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 (Qty. 9)
Assembly Part No: 5085-408085-14, COVER(CPL-D) ASSY
5010-203427-11 COVER (Qty. 1)
5010-203475-11 DUCT (Qty. 1)
5010-203471-12 COVER (Qty. 1)
5010-201727-11 COVER (Qty. 1)
5010-307317-11 COVER (Qty. 1)
5010-307316-11 COVER (Qty. 1)
5010-203047-11 COVER (Qty. 1)
5010-309042-11 COVER (Qty. 1)
044-001088-1 SUPPORT,PCB SB6-15 (Qty. 4)
026-006336-1 SPACER FWSSS-D5-V3-T1.3 (Qty. 2)
020-002601-1 BAIND SCREW M3*4 SUS304 (Qty. 14)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 4)
032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND (Qty. 2)
Assembly Part No: 5085-408086-13, COVER(CPL) ASSY,BACK
5010-406206-11 PLATE (Qty. 2)
5010-406207-11 PLATE (Qty. 2)
5010-308918-11 BASE,PANEL (Qty. 1)
5010-309041-11 PANEL (Qty. 1)
5010-306691-11 PLATE,NUT (Qty. 1)
5010-405681-11 PACKING (Qty. 2)
5010-307111-11 PACKING (Qty. 1)
5010-405584-11 LEVER (Qty. 2)
5010-405655-11 PLATE (Qty. 2)
5010-405656-11 PACKING (Qty. 2)
026-007246-1 SPACER WSSS5-3-1 (Qty. 10)
026-007272-1 SPACER FWSSS-D5-V3-T1.5 (Qty. 5)
020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P0287 (Qty. 2)
026-002709-1 HANDLE A-67 (Qty. 1)
020-000009-1 CAP SCREW M3*10 SUS304 (Qty. 6)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty. 6)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty. 2)
020-001532-1 BAIND SCREW M3*8 SUS304 (Qty. 9)
020-002601-1 BAIND SCREW M3*4 SUS304 (Qty. 4)
020-000032-1 CAP SCREW M4*10 SUS304 (Qty. 2)
020-000414-1 CAP SCREW M2*4 SUS304 (Qty. 4)
032-000008-1 FLAT WASHER M3 NYLON POLISHED ROUND (Qty. 13)
Assembly Part No: 5087-402531-13, BRACKET(DSW)ASSY
5010-308924-11 BRACKET (Qty. 1)
5010-308925-11 BRACKET (Qty. 1)
5010-308926-11 BRACKET (Qty. 1)
5010-308927-11 BRACKET (Qty. 1)
5010-407051-11 PLATE (Qty. 2)
5010-407052-11 PLATE (Qty. 2)
5010-401059-11 BLOCK (Qty. 2)
5010-401062-11 BLOCK (Qty. 2)
5086-400779-11 SENSOR,PHOTO CPL AGROUND #01 (Qty. 1)
033-000003-1 NUT M3 SUS304 (Qty. 12)
020-001089-1 CAP SCREW M3*14 SUS304 (Qty. 20)
020-000535-1 SET SCREW M3*15 SUS304 (Qty. 12)
032-000062-1 SPRING WASHER M5 SUS304 (Qty. 4)
020-002913-1 CAP SCREW M4*8 SUS304 W/SPR FLAT WASHER (Qty. 4)
032-000018-1 FLAT WASHER M5 SUS304 ROLISHED ROUND (Qty. 4)
020-001116-1 CAP SCREW M5*8 SUS304 (Qty. 4)
This TEL Tokyo Electron 300mm CPL is working surplus. The physical condition is good, but there are signs of previous use and handling.
Sale Details
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Item Condition: Working Surplus, 90 Day Warranty
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Estimated Packed Shipping Dimensions: L x W x H = 55"x27"x22" @ 190 lbs.; Requires Freight Shipping
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Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes.
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Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
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For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
- New, Refurbished, and Working items are sold with a 90-Day Satisfaction Guarantee
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